Vacuum anti-corrosion type laboratory compact spin coater is suitable for surface coating processes such as semiconductor, crystal, optical disc and plate making. This machine can be used for the preparation of coating film of strong acid and strong alkaline coating solution. This machine can vacuum the coating machine chamber to make the sample coating under full vacuum, which is suitable for the use of thin film materials which are easily oxidized and deteriorated in air.
Vacuum anti-corrosion type laboratory compact spin coater performance index:
Spin coating program: Up to 100 sets of programs can be stored, each set has 100 steps, each step can be accurate to 0.1 second
Rotation speed: 0-10,000rpm (optional for higher speed)
Spin coating acceleration: 0-50,000rpm/sec (no load)
Motor spin coating speed stability error: < ±1rpm
Speed adjustment accuracy and repeatability: 1rpm
Process time setting: 0-3,000sec/step, time setting accuracy: 0.1sec
Support wafer size: chip to 200mm (8" wafer)
Standard jaw carrier in vacuum mode
Vacuum anti-corrosion type laboratory compact spin coater product features:
1.The latest in-house compact design reduces the size of the device.
2.7" touch screen control panel operating system, more convenient to operate.
3.Using industrial grade servo motors, the motor design avoids the entry of photoresist and other contaminants into the motor.
4.The body is made of acid and alkali resistant, impact resistant and corrosion resistant stainless steel. It will never rust and is easy to clean.
5.The exhaust and pumping system is located at the bottom of the stage (to facilitate exhaust efficiency and spin coating uniformity).
6.The transparent visible, chemical-resistant sealing cap completely isolates the spillage of the photoresist and effectively isolates the emission of toxic odors during the spin coating operation.
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